Abstract: High-precision alignment between the wafer and mask is crucial for efficient lithography manufacturing. This study introduces a novel alignment mark combining a circular grating with ...
Abstract: Infrared small target detection (IRSTD) is of great practical significance in many real-world applications, such as maritime rescue and early warning systems, benefiting from the unique and ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results